Opto-mechanical probe for combining atomic force microscopy and optical near-field surface analysis

摘要

Wehave developed aneweasy-to-use probe that can be used to combine atomic force microscopy(AFM)and scanning near-field optical microscopy (SNOM). We show that, using this device, the evanescent field, obtained by total internal reflection conditions in a prism, can be visualized by approaching the surface with the scanning tip. Furthermore, we were able to obtain simultaneous AFM and SNOM images of a standard test grating in air and in liquid. The lateral resolution in AFM and SNOM mode was estimated to be 45 and 160 nm, respectively. This new probe overcomes a number of limitations that commercial probes have, while yielding the same resolution. © 2014 Optical Society of America.